Work

Laterally Driven Polysilicon Resonant Microstructures

Year: 1989

Type: article

Source: Sensors and Actuators

DOI: 10.1016/0250-6874(89)87098-2

Authors: William C. Tang, Tu-Cuong H. Nguyen, Roger T. Howe

Institution: University of California, Berkeley

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2177580458

FWCI: 16.6

Cites: 19

Cited by: 761

Related to: 8