Work

The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review

Year: 2015

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2015.2470132

Authors: Hoang-Phuong Phan, Dzung Viet Dao, Koichi Nakamura, Sima Dimitrijev, Nam-Trung Nguyen

Institutions: Griffith University, Kyoto University, Egypt-Japan University of Science and Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Australian National Fabrication Facility

OpenAlex ID: W2178269323

FWCI: 10.42

Cites: 135

Cited by: 254

Related to: 10