Work

Viscoelastic Properties of Polymers: Relevance for Hot Embossing Lithography

Year: 2003

Type: book-chapter

Source: Nanostructure science and technology

DOI: 10.1007/978-1-4419-9204-8_3

Author: Thomas Hoffmann

Institution: IMEC

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W21796279

FWCI: 60.42

Cites: 61

Cited by: 566

Related to: 10