Work

Residual stress in thin films PECVD depositions: A review

Year: 2011

Type: review

Authors: Ciprian Iliescu, Marioara Avram, B. Chen, Andrei C. Popescu, V. Dumitrescu, Daniel Puiu Poenar, Andreea Rodica Sterian, D. Vrtačnik, S. Amon, Paul E. Sterian

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2181319836

FWCI: 0.034

Cites: 1

Cited by: 18

Related to: 10