AC Electrothermal Characterization of Doped-Si Heated Microcantilevers Using Frequency-Domain Finite Element Analysis
Year: 2014
Type: article
Authors: Sina Hamian, Andrew M. Gauffreau, Thomas J. Walsh, K. Park
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2182571461