Optical Device Wafer Manufacturing in an IC Foundry
Year: 2003
Type: article
Authors: Sam C. Wang, Guojin Feng, Peter Lao, Sangmin Lee, Sujane Wang, Chanh Nguyen
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2184198018
