Work

16.2: A Single-Chip CMOS Resonant Beam Gas Sensor

Year: 2001

Type: article

Authors: Christoph Hagleitner, D. Lange, Oliver Brand, Andreas Hierlemann, Henry Baltes

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2185367413

FWCI:

Cites: 1

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Related to: 10