Work

Comparison of 100 Torr and 200 Torr Bpsg Layer Deposited Using Sub Atmospheric Chemical Vapour Deposition (sacvd) Process .

Year: 2010

Type: article

Authors: T. Jagadeesha, Louis J. Kim, Thammaiah Gowda

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2186300345

FWCI:

Cites: 4

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Related to: 10