Work

Challenges to Manufacturing Submicron, U Itra-Large Scale Integrated Circuits

Year: 1990

Type: article

Author: Richard B. Fair

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2187072793

FWCI:

Cites: 46

Cited by:

Related to: 10