Work

Fabrication of High-aspect-ratio Metal Structures With Planar Surfaces for Power Mems Devices

Year: 2009

Type: article

Authors: Mustafa İlker Beyaz, Matthew McCarthy, Reza Ghodssi

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2188266664

FWCI:

Cites: 6

Cited by: 3

Related to: 20