Work

MEMS Lithography and Micromachining Techniques

Year: 2011

Type: book-chapter

Source: MEMS reference shelf/MEMS reference Shelf

DOI: 10.1007/978-0-387-47318-5_9

Authors: Daniel R. Hines, Nathan P. Siwak, Lance A. Mosher, Reza Ghodssi

Institutions: University of Maryland, College Park, Lockheed Martin (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2188327119

FWCI:

Cites: 225

Cited by: 9

Related to: 10