Year: 2012
Type: conference-paper
Abstract: This paper introduces and demonstrates experimentally a new readout scheme for MEMS vibratory gyroscopes that relies on signal phase instead of signal amplitude to measure the rotation rate.When the drive and sense resonance modes of the gyroscope are both excited by forces of equal intensity and 90° phase difference, the Coriolis force induces a phase shift in the gyroscope response that is proportional to the gyroscope rotation rate.This effect is predicted by theoretical analysis and has been verified through simulation and measurement of two different gyroscopes, a high-frequency bulk acoustic wave (BAW) disk gyroscope, and a low-frequency mode-matched tuning fork gyroscope (M 2 -TFG).The two gyroscopes report a measured phase sensitivity of 0.597 mV/°/s and 0.148 mV/°/s, respectively.The linear response observed on both devices supports the use of the phase readout architecture as a valid measurement scheme.
Authors: M. Dalal, G. Casinovi, A.N. Shirazi, W.K. Sung, F. Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
Awards: G5792743163, G7322690257
OpenAlex ID: W2188647963