Work

Process-dependent thin-film thermal conductivities for thermal CMOS MEMS

Year: 2000

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/84.825788

Authors: M. von Arx, O. Paul, H. Baltes

Institutions: Georgia Institute of Technology, University of Freiburg, ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1999756238

FWCI: 8.031

Cites: 36

Cited by: 181

Related to: 10