Work

Multi-disciplinary Cad System for Mems

Year: 2001

Type: article

Authors: P. Stout, M. M. Athavale, Paul Dionne, Andrzej Przekwas

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2189577429

FWCI: 0.418

Cites: 10

Cited by: 3

Related to: 10