Work

Employing partially coherent, compact gas-discharge sources for coherent diffractive imaging with extreme ultraviolet light

Year: 2015

Type: conference-paper

Abstract: Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high-resolution extreme ultraviolet (EUV) microscopy. Here, we demonstrate CDI reconstruction of a complex valued object under illumination by a compact gas-discharge EUV light source emitting at 17.3 nm (O VI spectral line). The image reconstruction method accounts for the partial spatial coherence of the radiation and allows imaging even with residual background light. These results are a first step towards laboratory-scale CDI with a gas-discharge light source for applications including mask inspection for EUV lithography, metrology and astronomy.

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2187852

Authors: J. Bußmann, M. Odstrčil, R. Bresenitz, D. Rudolf, Jianwei Miao, W. S. Brocklesby, D. Grützmacher, L. Juschkin

Institutions: Forschungszentrum Jülich, RWTH Aachen University, University of Southampton, California NanoSystems Institute, University of California, Los Angeles

Language: English

Topic: Advanced X-ray Imaging Techniques

Subfield: Radiation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2191554566

FWCI: 3.842

Cites: 30

Cited by: 4

Related to: 10