Work

Characteristics and mechanism of phase change material W0.03Sb2Te etched by Cl2/BCl3 inductively coupled plasmas

Year: 2015

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2015.09.032

Authors: Lanlan Shen, Sannian Song, Zhonghua Zhang, Zhitang Song, Yan Cheng, Yueqin Zhu, Xiaohui Guo, Weijun Yin, Dongning Yao, Bo Liu, Songlin Feng

Institutions: Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, State Key Laboratory of Functional Materials for Informatics

Language: English

Topic: Phase-change materials and chalcogenides

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Chinese Academy of Sciences, Science and Technology Commission of Shanghai Municipality

Awards: G1154382831, G1292405369, G1507866218, G1824026687, G2085162751, G3219903371, G5089548229, G7245039038

OpenAlex ID: W2200514287

FWCI:

Cites: 11

Cited by: 3

Related to: 10