Ozone-Based Atomic Layer Deposition of Crystalline V2O5 Films for High Performance Electrochemical Energy Storage
Year: 2012
Type: article
Source: Chemistry of Materials
DOI: 10.1021/cm202901z
Authors: Xinyi Chen, Ekaterina Pomerantseva, Parag Banerjee, Keith Gregorczyk, Reza Ghodssi, Gary Rubloff
Institution: University of Maryland, College Park
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: U.S. Department of Energy
OpenAlex ID: W2208273153