Work

Non-uniform Composition Profiles in Inorganic Thin Films from Aqueous Solutions

Year: 2015

Type: article

Source: ACS Applied Materials & Interfaces

DOI: 10.1021/acsami.5b09692

Authors: Kurtis C. Fairley, Devin R. Merrill, Keenan N. Woods, Jeffrey Ditto, Can Xu, Richard P. Oleksak, Torgny Gustafsson, Darren W. Johnson, Eric L. Garfunkel, Gregory S. Herman, David C. Johnson, Catherine J. Page

Institutions: University of Oregon, Rutgers, The State University of New Jersey, Oregon State University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Division of Materials Research, Division of Chemistry

Awards: G4144029633, G5374649598

OpenAlex ID: W2208501839

FWCI: 2.411

Cites: 36

Cited by: 19

Related to: 10