Work

Application of high-resolution X-ray microscopy to image backend-of- line structures

Year: 2008

Type: conference-paper

Source: Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft)

Authors: Ehrenfried Zschech, Stefan Braun, Wenbing Yun

Institution: Fraunhofer Institute for Material and Beam Technology

Language: English

Topic: Advanced X-ray Imaging Techniques

Subfield: Radiation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2219705508

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Related to: 20