유연 실리콘 메모리를 위한 제조공정 기술 개발
Year: 2011
Type: article
Source: 대한기계학회 춘추학술대회
Language: Korean
Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2223610668