Work

Sputtering by ion bombardment theoretical concepts

Year: 1981

Type: book-chapter

Source: Topics in applied physics

DOI: 10.1007/3540105212_7

Author: Peter Sigmund

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2238541107

FWCI: 25.06

Cites: 125

Cited by: 518

Related to: 10