Work

Feedback stabilized deformable membrane mirrors for focus control

Year: 2009

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.812338

Authors: Sarah J. Lukes, Phillip A. Himmer, Eric J. Moog, Steven R. Shaw, David L. Dickensheets

Institution: Montana State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W2256680588

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