Deposition of High-Efficiency Microcrystalline Silicon Solar Cells Using SiF $_{\bf 4}$/H$_{\bf 2}$/Ar Mixtures
Year: 2012
Type: article
Source: IEEE Journal of Photovoltaics
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2258688764
