AFM Measurements of Adhesion between Actual CMP Slurry Particles and Various Substrates
Year: 2005
Type: article
Source: MRS Proceedings
Authors: Yong Liu, Bogdan Zdyrko, Alex Tregub, Mansour Moinpour, Mark Buehler, Igor Luzinov
Institutions: Clemson University, Intel (United States)
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2261005059