Fabrication of the refined MEMS-based compound grating (MCG) based on silicon micromachining
Year: 2001
Type: conference-paper
DOI: 10.1117/12.442953
Authors: Yahong Yao, Bai Xu, James Castracane
Institution: University at Albany, State University of New York
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2262904096