Work

CMOS-MEMS: Advanced Micro and Nanosystems (Advanced Micro and Nanosystems)

Year: 2005

Type: book

Source: John Wiley & Sons, Inc. eBooks

Authors: Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2265216338

FWCI:

Cites:

Cited by: 19

Related to: 10