Year: 2013
Type: preprint
Abstract: In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined using a matched boundary layer. The method is applied to calculate the frequency dependent admittance of a diamond disk resonator. Results agree well with measurements and analytic results. Comparison to a frequency response analysis establishes the validity of the method and shows that it results in a large reduction of the simulation time.
Source: arXiv (Cornell University)
Authors: Steeneken, P. G., Ruigrok, J. J. M., Kang, S., van Beek, J. T. M., Bontemps, J., Koning, J. J.
Institution: NXP (Germany)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W2268857563