Year: 2016
Type: article
Abstract: Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young's modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. These materials are interesting for applications in structural energy storage, tribology, and gas separation.
Source: Science
Institutions: Centre National de la Recherche Scientifique, Université Toulouse III - Paul Sabatier, Réseau sur le Stockage Electrochimique de l'énergie, Centre Interuniversitaire de Recherche et d’Ingénierie des Matériaux, Institut d'Electronique, de Microélectronique et de Nanotechnologie, Université Lille 1, Institut National des Sciences Appliquées de Toulouse, Laboratoire de Physique et Chimie des Nano-Objets, Université de Toulouse, Laboratoire de Réactivité et Chimie des Solides, Université de Picardie Jules Verne, Drexel University
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W2275817816