Study on the Effect of Heat Loss in Post Exposure Bake Process
Year: 2009
Type: article
Source: 한국산업응용수학회 학술대회 논문집
Authors: Sarah Kim, Do Wan Kim
Institution: Hanyang University
Language: Korean
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2279110350
