Fabrication of Nanoimprint Stamps by Nanosphere Lithography
Year: 2003
Type: article
Source: MRS Proceedings
Authors: Chun-Wen Kuo, Jau-Ye Shiu, Yi-Hong Cho, Peilin Chen
Institution: Academia Sinica
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Council
OpenAlex ID: W2282847196