A high-frequency epitaxially encapsulated single-drive quad-mass tri-axial resonant tuning fork gyroscope
Year: 2016
Type: conference-paper
Authors: S. Wisher, P. Shao, A. Norouzpour-Shirazi, Y. Yang, E. Ng, I. Flader, Y. Chen, D. Heinz, T. Kenny, F. Ayazi
Institutions: Georgia Institute of Technology, Stanford University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2290745087