Work

Micromachined piezoelectric ultrasonic transducer based on dome-shaped diaphragm supported by flat square diaphragm

Year: 2016

Type: conference-paper

Source: Proceedings, IEEE micro electro mechanical systems

DOI: 10.1109/memsys.2016.7421829

Authors: Yongkui Tang, Yufeng Wang, Lurui Zhao, Anton Shkel, Eun Sok Kim

Institution: University of Southern California

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W2291051371

FWCI:

Cites: 9

Cited by: 5

Related to: 10