Stiffness trimming of high Q MEMS resonators by excimer laser annealing of germanium thin film on silicon
Year: 2016
Type: conference-paper
Authors: Benoit Hamelin, Anosh Daruwalla, Farrokh Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2291524730