Work

HARPSS-fabricated nano-gap comb-drive for efficient linear actuation of high frequency BAW resonators

Year: 2016

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2016.7421805

Authors: Haoran Wen, Anosh Daruwalla, Ramin Mirjalili, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2292086043

FWCI: 4.691

Cites: 7

Cited by: 13

Related to: 10