Work

Regular Paper : Reflectivity Control at Substrate / Photoresist Interface by Inorganic Bottom Anti-Reflection Coating for Nanometerscaled Devices

Year: 2014

Type: article

Authors: Sang Yong Kim, Yong Sik Kim

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2294557820

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