Work

Plasma processing

Year: 1994

Type: article

Source: IEEE Transactions on Plasma Science

DOI: 10.1109/27.281547

Author: D.B. Graves

Institution: University of California, Berkeley

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4237060936

FWCI: 13.9

Cites: 53

Cited by: 196

Related to: 10