Work

Verification and application of multi-source focus quantification

Year: 2016

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2219143

Authors: J.-G. Simiz, T. Hasan, F. Staals, B. Le-Gratiet, W. T. Tel, C. Prentice, J.-W. Gemmink, A. Tishchenko, Y. Jourlin

Institutions: Centre National de la Recherche Scientifique, Laboratoire Hubert Curien, STMicroelectronics (France), ASML (United States), ASML (Netherlands)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2299068352

FWCI: 3.28

Cites: 11

Cited by: 7

Related to: 10