Bimorph Diaphragm Formed by Two PZT Sheets on Micromachined Silicon for Sound Generation
Year: 2010
Type: conference-paper
DOI: 10.4071/2010dpc-wp25
Authors: Youngki Choe, Shih-Jui Chen, Eun Sok Kim
Institution: University of Southern California
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2304588220