Work

Fabrication of Metal FEAs on Double Polycrystalline Silicon Layers

Year: 1997

Type: article

Source: 대한전자공학회 학술대회

Authors: Il Hwan Kim, Chun Gyoo Lee, Jong Duk Lee

Language: Korean

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2309409513

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