Characterization of Oxide Thermoelectric Material Ca3.4Al1.2Co2Oy Thin Films Prepared by rf Magnetron Sputtering.
Year: 2002
Type: article
Abstract: We prepared and characterized thin films of n- type oxide thermoelectric material Ca3.4Al1.2Co2Oy (CACO) by rf magnetron sputtering method. We successfully obtained the good crystalline c-axis oriented CACO thin films on a SrTiO3 (STO) (100) substrate. The electrical resistivity and the Seebeck coefficient of a CACO film with 1.4μm thickness were measured along the ab-plane in the temperature range from 300 to 900K. From an Arrhenius plot of resistivity values, we estimated that the activation energy of 0.33eV for the CACO films. The Seebeck coefficient of the film was about -60μVK-1 at 370K. The conduction type was changed from n- to p-type with increasing temperature.
Authors: Mika UENO, Yutaka YOSHIDA, Takahiro TERADA, Yoshiaki TAKAI
Institution: Nagoya University
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W2314098140