Work

Heteroepitaxial Si-ZrO2-Si by MOCVD

Year: 1993

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-335-123

Authors: Anton C. Greenwald, Nader M. Kalkhoran, Fereydoon Namavar, Alain E. Kaloyeros, Ioannis Stathakos

Institutions: Spire Corporation (United States), State University of New York, University at Albany, State University of New York

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2315183357

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Cites: 14

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Related to: 10