Inflimne of Dopant type and Conceintrtion on Hydrogen Diffusion in Silicon
Year: 1988
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-138-209
Institution: University at Albany, State University of New York
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2317976503