A Novel Slurry for DRAM Polysilicon CMP
Year: 2009
Type: conference-paper
Source: ECS Transactions
DOI: 10.1149/1.3096494
Authors: Chen Wang, Yibin Cao, Chunxiao Yang, Haifeng Zhou, Jianfe Jing, Zhiping Xia, Jingji Tang, Jun Lin, Charles Chiu, Shumin Wang, Chris Yu
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2318167207