Work

Electrical Characterization of BCB for Electrostatic Microelectromechanical Devices

Year: 2003

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-782-a5.69

Authors: Alireza Modafe, Nima Ghalichechian, Benjamin Kleber, Reza Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2318865726

FWCI:

Cites: 16

Cited by: 4

Related to: 10