Ultrathin Soi Structures by Low Energy Oxygen Implantation
Year: 1991
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-235-109
Institution: Spire Corporation (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2321047982