Modelinig of Dopant Diffusion and Associated Effects in Silicon
Year: 1982
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-14-61
Author: Richard B. Fair
Institution: MCNC Research and Development Institute
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2322185432