Simulation and Experimental Study on Multilayer Double-Patterning Processes
Year: 2010
Type: conference-paper
Source: ECS Transactions
DOI: 10.1149/1.3360662
Authors: Douglas J. Guerrero, Daniel M. Sullivan, Zhimin Zhu, Ramil Marcelo L. Mercado
Institution: Brewer Science (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Bhabha Atomic Research Centre
OpenAlex ID: W2322522368