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ChemInform Abstract: TITANIUM‐TUNGSTEN METALIZATION SYSTEM ON SILICON

Year: 1976

Type: article

Source: ChemInform

DOI: 10.1002/chin.197617034

Authors: J. M. HARRIS, S. S. LAU, M.‐A. NICOLET, R. S. NOWICKI

Language: German

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2323688408

FWCI:

Cites: 1

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Related to: 10