Robust Trilayer Patterning Technique
Year: 2013
Type: conference-paper
Source: ECS Transactions
Authors: Zhimin Zhu, Micheal Weigand, Vandana Krishnamurthy, Daniel Sullivan
Institution: Brewer Science (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2323816144