Work

Ultrathin Low Energy Simox for Low Cost, High Density Applications

Year: 1993

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-316-1053

Authors: Fereydoon Namavar, N.M. Kalkhoran, A. Cremins

Institution: Spire Corporation (United States)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2324814894

FWCI:

Cites: 5

Cited by: 2

Related to: 10